Oh, Kyung Su; Kim, DongHyun; Park, Seungho; Kwon, Ohmyoung; Choi, Young Ki; Lee, Joon Sik
ArticleIssue Date2008CitationMICRONANO2008-2ND INTERNATIONAL CONFERENCE ON INTEGRATION AND COMMERCIALIZATION OF MICRO AND NANOSYSTEMS, PROCEEDINGS, pp.399 - 401PublisherAMER SOC MECHANICAL ENGINEERS