Analysis and design of thermal double-cantilever bimorph actuators for rotating-type micromirrors
- Authors
- Kim, DongHyun; Oh, Kyung su; Park, Seungho; Kwon, Ohmyoung; Choi, Young Ki; Lee, Joon Sik
- Issue Date
- 2008
- Publisher
- AMER SOC MECHANICAL ENGINEERS
- Keywords
- micro actuators; thermal double-cantilever bimorph actuators; thermal expansion; intellisuite
- Citation
- PROCEEDINGS OF THE MICRO/NANOSCALE HEAT TRANSFER INTERNATIONAL CONFERENCE 2008, PTS A AND B, pp.1063 - 1067
- Journal Title
- PROCEEDINGS OF THE MICRO/NANOSCALE HEAT TRANSFER INTERNATIONAL CONFERENCE 2008, PTS A AND B
- Start Page
- 1063
- End Page
- 1067
- URI
- https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/29882
- Abstract
- This paper reports the design and simulation of thermal double-cantilever bimorph(TDCB) actuators that can be used to drive micromirrors efficiently. A TDCB actuator combines two paralleled bimorph actuators acting in opposite directions for rotational control of micromirrors. Each actuator is structured by nickel and silicon dioxide thin films with an embedded polysilicon line as a heat source. With a size of only 20 mu m in width and 100 mu m in length, TDCB actuators result in vertical displacement of 28 mu m m at 11 volts DC which is a significant improvement, comparing to the conventional thermal bimorph actuators.
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - College of Engineering > Department of Mechanical and System Design Engineering > 1. Journal Articles
![qrcode](https://api.qrserver.com/v1/create-qr-code/?size=55x55&data=https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/29882)
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.