A DBD-Integrated Discharge Device for Low-Voltage Atmospheric Plasma Generation
- Authors
- Hong, Changhun; Kim, Young min
- Issue Date
- Nov-2020
- Publisher
- IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
- Citation
- IEEE TRANSACTIONS ON PLASMA SCIENCE, v.48, no.11, pp.3890 - 3894
- Journal Title
- IEEE TRANSACTIONS ON PLASMA SCIENCE
- Volume
- 48
- Number
- 11
- Start Page
- 3890
- End Page
- 3894
- URI
- https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/11482
- DOI
- 10.1109/TPS.2020.3031302
- ISSN
- 0093-3813
- Abstract
- A dielectric barrier discharge (DBD)-integrated plasma device for low-voltage atmospheric plasma generation is presented. By utilizing DBD afterglows as initiation carriers, a significant reduction in the breakdown voltage across a gap of 1 mm was achieved. The use of integrated DBD offers a precise control of initiation carrier injection and suppresses sputtering-induced electrode wear. The proposed integration scheme enables a highly reliable atmospheric plasma generation on a substrate at a very low voltage. This study also reveals that the injection location and the amount of initiation carriers play a key role in triggering avalanche breakdown process in the discharge. An optimized device structure has demonstrated atmospheric plasma across a gap of 1 mm at 700 V, which is only one-third of the breakdown voltage using a conventional two-electrode structure.
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