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Small size Si precursor inhibitors for area-selective atomic layer deposition
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Ko, Byeong Guk | - |
| dc.contributor.author | Khan, Mohammad Rizwan | - |
| dc.contributor.author | Lee, Jae Kwang | - |
| dc.contributor.author | Shong, Bonggeun | - |
| dc.contributor.author | Kim, Woo-Hee | - |
| dc.contributor.author | Lee, Han-Bo-Ram | - |
| dc.date.available | 2021-03-17T08:42:12Z | - |
| dc.date.created | 2020-07-06 | - |
| dc.date.issued | 2018-08-19 | - |
| dc.identifier.issn | 0065-7727 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/12999 | - |
| dc.language | 영어 | - |
| dc.language.iso | en | - |
| dc.publisher | AMER CHEMICAL SOC | - |
| dc.title | Small size Si precursor inhibitors for area-selective atomic layer deposition | - |
| dc.type | Article | - |
| dc.contributor.affiliatedAuthor | Shong, Bonggeun | - |
| dc.identifier.wosid | 000447600004247 | - |
| dc.identifier.bibliographicCitation | ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, v.256 | - |
| dc.relation.isPartOf | ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | - |
| dc.citation.title | ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | - |
| dc.citation.volume | 256 | - |
| dc.type.rims | ART | - |
| dc.type.docType | Meeting Abstract | - |
| dc.description.journalClass | 1 | - |
| dc.description.journalRegisteredClass | scie | - |
| dc.relation.journalResearchArea | Chemistry | - |
| dc.relation.journalWebOfScienceCategory | Chemistry, Multidisciplinary | - |
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Related Researcher
- Shong, Bong geun
- Engineering (Chemical Engineering)