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SF<inf>6</inf> plasma treatment for leakage current reduction of AlGaN/GaN heterojunction field-effect transistors

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dc.contributor.authorKim, Hyun-seop-
dc.contributor.authorH.-S.-
dc.contributor.authorSeo-
dc.contributor.authorK.-S.-
dc.contributor.authorOh-
dc.contributor.authorJ.-
dc.contributor.authorCha, Hoyoung-
dc.contributor.authorH.-Y.-
dc.date.available2021-03-17T08:43:24Z-
dc.date.created2021-02-26-
dc.date.issued2018-
dc.identifier.urihttps://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/13055-
dc.titleSF&lt;inf&gt;6&lt;/inf&gt; plasma treatment for leakage current reduction of AlGaN/GaN heterojunction field-effect transistors-
dc.typeArticle-
dc.contributor.affiliatedAuthorCha, Hoyoung-
dc.identifier.doi10.1016/j.rinp.2018.06.009-
dc.identifier.scopusid2-s2.0-85049555813-
dc.identifier.bibliographicCitationResults in Physics, v.10, pp.248 - 249-
dc.relation.isPartOfResults in Physics-
dc.citation.titleResults in Physics-
dc.citation.volume10-
dc.citation.startPage248-
dc.citation.endPage249-
dc.type.rimsART-
dc.type.docTypeArticle-
dc.description.journalClass1-
dc.description.journalRegisteredClassscopus-
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