Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Analysis of chemical reaction mechanisms during ALD: DFT and in situ
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 송봉근 | - |
| dc.date.available | 2020-07-10T02:41:54Z | - |
| dc.date.created | 2020-07-08 | - |
| dc.date.issued | 2019-07-11 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/1311 | - |
| dc.language | 한국어 | - |
| dc.language.iso | ko | - |
| dc.publisher | 한국반도체디스플레이기술학회 | - |
| dc.title | Analysis of chemical reaction mechanisms during ALD: DFT and in situ | - |
| dc.type | Article | - |
| dc.contributor.affiliatedAuthor | 송봉근 | - |
| dc.identifier.bibliographicCitation | Atomic Craft Workshop, v.0, no.0, pp.0 - 0 | - |
| dc.relation.isPartOf | Atomic Craft Workshop | - |
| dc.citation.title | Atomic Craft Workshop | - |
| dc.citation.volume | 0 | - |
| dc.citation.number | 0 | - |
| dc.citation.startPage | 0 | - |
| dc.citation.endPage | 0 | - |
| dc.type.rims | ART | - |
| dc.description.journalClass | 2 | - |
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - College of Engineering > Chemical Engineering Major > 1. Journal Articles
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Shong, Bong geun
- Engineering (Chemical Engineering)