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GaN based hydrogen sensor in Humid Ambient
- Issue Date
- 2017
- Publisher
- ELECTROCHEMICAL SOC INC
- Citation
- ECS Transactions, v.77, no.6, pp.33 - 37
- Journal Title
- ECS Transactions
- Volume
- 77
- Number
- 6
- Start Page
- 33
- End Page
- 37
- ISSN
- 1938-5862
- Abstract
- AlGaN/GaN HEMT based hydrogen sensor incorporating poly(methyl methacrylate) (PMMA) membrane was fabricated. The maximum sensitivities of 2.6x10(5)% were obtained for both dry and humid 500 ppm hydrogen. The PMMA layer effectively permits the approach of hydrogen molecules to catalytic platinum surface, while blocking the penetration of water molecules. The PMMA encapsulated device also showed reliable hydrogen gas sensing characteristics even after 25-100 degrees C heating cycle stress.
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Related Researcher
- Baik, Kwang Hyeon
- Science & Technology (Department of Nanomaterials Engineering)