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Results 1-2 of 2 (Search time: 0.003 seconds).
Line‐edge roughness from extreme ultraviolet lithography to fin‐field‐effect‐transistor: Computational study
Kim, S.-K.
Article
Issue Date
2021
Citation
Micromachines, v.12, no.12
Publisher
MDPI
Defect repairs for the extreme ultraviolet mask
Kim, Sang-Kon
Article
Issue Date
2021
Citation
Proceedings of SPIE - The International Society for Optical Engineering, v.11609
Publisher
SPIE
1
Discover
Subject
Lithography
2
Critical dimension
1
Critical problems
1
Defects
1
DEVICE
1
EUV
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EUVL mask defect
1
EUVL mask repair
1
Extreme ultraviolet
1
Extreme ultraviolet lithography
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