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Results 1-1 of 1 (Search time: 0.003 seconds).
Defect repairs for the extreme ultraviolet mask
Kim, Sang-Kon
Article
Issue Date
2021
Citation
Proceedings of SPIE - The International Society for Optical Engineering, v.11609
Publisher
SPIE
1
Discover
Subject
Critical dimension
1
Defects
1
EUVL mask defect
1
EUVL mask repair
1
Extreme ultraviolet lithography
1
Extreme ultraviolet masks
1
Extreme ultraviolets
1
Integrated chips
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Lithography
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ML defects
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Date Issued
2021
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Proceedings of SPIE - The Interna...
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