한국어
LIBRARY
Communities & Collections
Researchers
Titles
Issue Date
Journals
검색
Search
All of ScholarWorks
Department of General Studies
Department of General Studies
ETC
Current filters:
Title
Author
Subject
Date Issued
Type
Language
Journal
Journal Index
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Current filters:
Title
Author
Subject
Date Issued
Type
Language
Journal
Journal Index
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Add filters:
Title
Author
Subject
Date Issued
Type
Language
Journal
Journal Index
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Results/Page
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
Sort items by
Relevance
Title
Issue Date
In order
Ascending
Descending
Authors/record
All
1
5
10
15
20
25
30
35
40
45
50
Results 1-5 of 5 (Search time: 0.005 seconds).
Plasmonic computational lithography for below 10-nm patterning
Kim, Sang-kon
Article
Issue Date
2020
Citation
Proceedings of SPIE - The International Society for Optical Engineering, v.11462
Publisher
SPIE
Line‐edge roughness from extreme ultraviolet lithography to fin‐field‐effect‐transistor: Computational study
Kim, S.-K.
Article
Issue Date
2021
Citation
Micromachines, v.12, no.12
Publisher
MDPI
Aerial image formation of quantum lithography for diffraction limit
Kim, Sang-Kon
Article
Issue Date
2012
Citation
CURRENT APPLIED PHYSICS, v.12, no.6, pp.1566 - 1574
Publisher
ELSEVIER
Impact of process parameters on pattern formation in the maskless plasmonic computational lithography
Kim, Sang-Kon
Article
Issue Date
2015
Citation
CURRENT APPLIED PHYSICS, v.15, no.6, pp.698 - 702
Publisher
ELSEVIER SCIENCE BV
Defect repairs for the extreme ultraviolet mask
Kim, Sang-Kon
Article
Issue Date
2021
Citation
Proceedings of SPIE - The International Society for Optical Engineering, v.11609
Publisher
SPIE
1
Discover
Subject
Lithography
4
Metamaterials
2
Plasmonic lithography
2
Surface plasmon
2
Critical dimension
1
Critical problems
1
Defects
1
DEVICE
1
Diffraction limit
1
Entangled photons
1
.
next >
Date Issued
2021
2
2020
1
2015
1
2012
1
Type
Article
5
Language
English
5
Journal
Current Applied Physics
2
Proceedings of SPIE - The Interna...
2
Micromachines
1
BROWSE
한국어
Communities & Collections
Researchers
Titles
Journals
LIBRARY