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Results 1-2 of 2 (Search time: 0.002 seconds).
Plasmonic computational lithography for below 10-nm patterning
Kim, Sang-kon
Article
Issue Date
2020
Citation
Proceedings of SPIE - The International Society for Optical Engineering, v.11462
Publisher
SPIE
Defect repairs for the extreme ultraviolet mask
Kim, Sang-Kon
Article
Issue Date
2021
Citation
Proceedings of SPIE - The International Society for Optical Engineering, v.11609
Publisher
SPIE
1
Discover
Author
kim, sang-kon
2
Subject
Lithography simulation
2
Critical dimension
1
Critical problems
1
Defects
1
EUVL mask defect
1
EUVL mask repair
1
Extreme ultraviolet lithography
1
Extreme ultraviolet masks
1
Extreme ultraviolets
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Integrated chips
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Date Issued
2021
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2020
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