한국어
LIBRARY
Communities & Collections
Researchers
Titles
Issue Date
Journals
검색
Search
All of ScholarWorks
Department of General Studies
Department of General Studies
ETC
Current filters:
Title
Author
Subject
Date Issued
Type
Language
Journal
Journal Index
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Current filters:
Title
Author
Subject
Date Issued
Type
Language
Journal
Journal Index
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Current filters:
Title
Author
Subject
Date Issued
Type
Language
Journal
Journal Index
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Add filters:
Title
Author
Subject
Date Issued
Type
Language
Journal
Journal Index
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Results/Page
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
Sort items by
Relevance
Title
Issue Date
In order
Ascending
Descending
Authors/record
All
1
5
10
15
20
25
30
35
40
45
50
Results 1-5 of 5 (Search time: 0.004 seconds).
Line‐edge roughness from extreme ultraviolet lithography to fin‐field‐effect‐transistor: Computational study
Kim, S.-K.
Article
Issue Date
2021
Citation
Micromachines, v.12, no.12
Publisher
MDPI
Line-Edge Roughness on Fin-Field-Effect-Transistor Performance for 7-nm and 5-nm Patterns
Kim, Sang-Kon
Article
Issue Date
2020
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.20, no.11, pp.6912 - 6915
Publisher
AMER SCIENTIFIC PUBLISHERS
Computational Study of Extreme Ultraviolet Vote-Taking Lithography for Defect Repair
Kim, Sang-Kon
Article
Issue Date
2020
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.20, no.8, pp.4994 - 4997
Publisher
AMER SCIENTIFIC PUBLISHERS
Computational Sub-10 nm Plasmonic Nanogap Patterns by Block Copolymer Self-Assembly
Kim, Sang-Kon
Article
Issue Date
2021
Citation
JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS, v.16, no.7, pp.1063 - 1066
Publisher
AMER SCIENTIFIC PUBLISHERS
Defect repairs for the extreme ultraviolet mask
Kim, Sang-Kon
Article
Issue Date
2021
Citation
Proceedings of SPIE - The International Society for Optical Engineering, v.11609
Publisher
SPIE
1
Discover
Author
kim, sang-kon
5
Subject
EUV
3
Lithography Simulation
3
FinFET
2
IMPACT
2
LER
2
Lithography simulation
2
Block Copolymer (BCP)
1
Critical dimension
1
Critical problems
1
Defects
1
.
next >
Date Issued
2021
3
2020
2
Type
Article
5
Journal
Journal of Nanoscience and Nanote...
2
Journal of Nanoelectronics and Op...
1
Micromachines
1
Proceedings of SPIE - The Interna...
1
BROWSE
한국어
Communities & Collections
Researchers
Titles
Journals
LIBRARY