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Results 1-1 of 1 (Search time: 0.002 seconds).
Line-Edge Roughness on Fin-Field-Effect-Transistor Performance for 7-nm and 5-nm Patterns
Kim, Sang-Kon
Article
Issue Date
2020
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.20, no.11, pp.6912 - 6915
Publisher
AMER SCIENTIFIC PUBLISHERS
1
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Author
kim, sang-kon
1
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FinFET
1
LER
1
Lithography
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Lithography Simulation
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TCAD
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Date Issued
2020
1
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Article
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English
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Journal of Nanoscience and Nanote...
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