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Results 1-2 of 2 (Search time: 0.002 seconds).
Line-Edge Roughness on Fin-Field-Effect-Transistor Performance for 7-nm and 5-nm Patterns
Kim, Sang-Kon
Article
Issue Date
2020
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.20, no.11, pp.6912 - 6915
Publisher
AMER SCIENTIFIC PUBLISHERS
Computational Study of Extreme Ultraviolet Vote-Taking Lithography for Defect Repair
Kim, Sang-Kon
Article
Issue Date
2020
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.20, no.8, pp.4994 - 4997
Publisher
AMER SCIENTIFIC PUBLISHERS
1
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Author
kim, sang-kon
2
Subject
Lithography
2
FinFET
1
LER
1
Line Edge Roughness
1
Mask Defect
1
TCAD
1
Vote-Taking
1
Date Issued
2020
2
Type
Article
2
Language
English
2
Journal
Journal of Nanoscience and Nanote...
2
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