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Results 1-3 of 3 (Search time: 0.005 seconds).
Line‐edge roughness from extreme ultraviolet lithography to fin‐field‐effect‐transistor: Computational study
Kim, S.-K.
Article
Issue Date
2021
Citation
Micromachines, v.12, no.12
Publisher
MDPI
Line-Edge Roughness on Fin-Field-Effect-Transistor Performance for 7-nm and 5-nm Patterns
Kim, Sang-Kon
Article
Issue Date
2020
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.20, no.11, pp.6912 - 6915
Publisher
AMER SCIENTIFIC PUBLISHERS
Computational Study of Extreme Ultraviolet Vote-Taking Lithography for Defect Repair
Kim, Sang-Kon
Article
Issue Date
2020
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.20, no.8, pp.4994 - 4997
Publisher
AMER SCIENTIFIC PUBLISHERS
1
Discover
Author
kim, sang-kon
3
Subject
Lithography
3
FinFET
2
LER
2
Lithography Simulation
2
DEVICE
1
Extreme ultraviolet
1
Fin‐field‐effect‐transistor
1
IMPACT
1
INGAAS
1
Line Edge Roughness
1
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Date Issued
2021
1
2020
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English
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Journal of Nanoscience and Nanote...
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Micromachines
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