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Results 1-1 of 1 (Search time: 0.002 seconds).
Effects of Line-Edge Roughness on Extreme Ultraviolet Lithography CDs and Fin-Field-Effect-Transistor Performance for Below 10-nm Patterns
Kim, Sang-Kon
Article
Issue Date
2017
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.17, no.11, pp.8338 - 8343
Publisher
AMER SCIENTIFIC PUBLISHERS
1
Discover
Subject
DEVICES
1
FinFET
1
LER
1
Line Edge Roughness
1
Lithography Simulation
1
SIMULATION
1
Language
English
1
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