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Results 1-3 of 3 (Search time: 0.034 seconds).
Line-Edge Roughness Stochastics for 5-nm Pattern Formation in the Extreme Ultraviolet Lithography
Kim, Sang-Kon
Article
Issue Date
2019
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.19, no.8, pp.4657 - 4660
Publisher
AMER SCIENTIFIC PUBLISHERS
Line-Edge Roughness on Fin-Field-Effect-Transistor Performance for 7-nm and 5-nm Patterns
Kim, Sang-Kon
Article
Issue Date
2020
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.20, no.11, pp.6912 - 6915
Publisher
AMER SCIENTIFIC PUBLISHERS
Effects of Line-Edge Roughness on Extreme Ultraviolet Lithography CDs and Fin-Field-Effect-Transistor Performance for Below 10-nm Patterns
Kim, Sang-Kon
Article
Issue Date
2017
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.17, no.11, pp.8338 - 8343
Publisher
AMER SCIENTIFIC PUBLISHERS
1
Discover
Subject
EUV
3
LER
3
Lithography
3
Lithography Simulation
3
FinFET
2
DEVICES
1
SIMULATION
1
Stochastic Simulation
1
TCAD
1
Date Issued
2020
1
2019
1
2017
1
Type
Article
3
Language
English
3
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