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Results 11-11 of 11 (Search time: 0.002 seconds).
A Molecular View of Block Copolymer Directed Assembly with Solvent Vapors Simulation
Kim, Sang-Kon
Article
Issue Date
2017
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.17, no.11, pp.8369 - 8371
Publisher
AMER SCIENTIFIC PUBLISHERS
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Lithography Simulation
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Lithography
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EUV
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Block Copolymer
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LER
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Line Edge Roughness
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DEVICES
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FinFET
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Mask Defect
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Self-Assembly
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