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Results 1-2 of 2 (Search time: 0.002 seconds).
Computational Study of Extreme Ultraviolet Vote-Taking Lithography for Defect Repair
Kim, Sang-Kon
Article
Issue Date
2020
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.20, no.8, pp.4994 - 4997
Publisher
AMER SCIENTIFIC PUBLISHERS
Extreme Ultraviolet Multilayer Defect Compensation in Computational Lithography
Kim, Sang-Kon
Article
Issue Date
2016
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.16, no.5, pp.5415 - 5419
Publisher
AMER SCIENTIFIC PUBLISHERS
1
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Author
kim, sang-kon
2
Subject
Lithography
2
Lithography Simulation
2
Defect Repair
1
EUV
1
EUV Mask
1
EUVL
1
SIMULATION
1
Vote-Taking
1
Date Issued
2020
1
2016
1
Type
Article
2
Language
English
2
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