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Results 1-10 of 20 (Search time: 0.004 seconds).
Modeling and Simulation of Line Edge Roughness for EUV Resists
김상곤
Article
Issue Date
2014
Citation
JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE, v.14, no.1, pp.61 - 69
Publisher
대한전자공학회
Computational Study of Extreme Ultraviolet Vote-Taking Lithography for Defect Repair
Kim, Sang-Kon
Article
Issue Date
2020
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.20, no.8, pp.4994 - 4997
Publisher
AMER SCIENTIFIC PUBLISHERS
Line-Edge Roughness Stochastics for 5-nm Pattern Formation in the Extreme Ultraviolet Lithography
Kim, Sang-Kon
Article
Issue Date
2019
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.19, no.8, pp.4657 - 4660
Publisher
AMER SCIENTIFIC PUBLISHERS
Line-Edge Roughness on Fin-Field-Effect-Transistor Performance for 7-nm and 5-nm Patterns
Kim, Sang-Kon
Article
Issue Date
2020
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.20, no.11, pp.6912 - 6915
Publisher
AMER SCIENTIFIC PUBLISHERS
Effects of Line-Edge Roughness on Extreme Ultraviolet Lithography CDs and Fin-Field-Effect-Transistor Performance for Below 10-nm Patterns
Kim, Sang-Kon
Article
Issue Date
2017
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.17, no.11, pp.8338 - 8343
Publisher
AMER SCIENTIFIC PUBLISHERS
A Molecular View of Block Copolymer Directed Assembly with Solvent Vapors Simulation
Kim, Sang-Kon
Article
Issue Date
2017
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.17, no.11, pp.8369 - 8371
Publisher
AMER SCIENTIFIC PUBLISHERS
Computational Study of Electrohydrodynamic Jet Printing with Block-Copolymer Inks
Kim, Sang-Kon
Article
Issue Date
2017
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.17, no.8, pp.5432 - 5435
Publisher
AMER SCIENTIFIC PUBLISHERS
Impact of Plasmonic Parameters on 7-nm Patterning in Plasmonic Computational Lithography
Kim, Sang-Kon
Article
Issue Date
2018
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.18, no.10, pp.7124 - 7127
Publisher
AMER SCIENTIFIC PUBLISHERS
Impact of Process Parameters on a Combining Process of Block-Copolymer Self-Assembly with Electrohydrodynamic Jet Printing
Kim, Sang-Kon
Article
Issue Date
2017
Citation
SCIENCE OF ADVANCED MATERIALS, v.9, no.1, pp.42 - 47
Publisher
AMER SCIENTIFIC PUBLISHERS
Line-edge roughness on fin-field-effect-Transistor performance for below 10nm patterns
Kim, Sang-kon
; S.-K.
Article
Issue Date
2019
Citation
Proceedings of SPIE - The International Society for Optical Engineering, v.10957
Publisher
SPIE
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EUV
6
LER
6
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5
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4
FinFET
4
Line Edge Roughness
3
Metamaterials
3
SIMULATION
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