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Results 1-3 of 3 (Search time: 0.153 seconds).
Computational Study of Extreme Ultraviolet Vote-Taking Lithography for Defect Repair
Kim, Sang-Kon
Article
Issue Date
2020
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.20, no.8, pp.4994 - 4997
Publisher
AMER SCIENTIFIC PUBLISHERS
Line-Edge Roughness on Fin-Field-Effect-Transistor Performance for 7-nm and 5-nm Patterns
Kim, Sang-Kon
Article
Issue Date
2020
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.20, no.11, pp.6912 - 6915
Publisher
AMER SCIENTIFIC PUBLISHERS
Computational Sub-10 nm Plasmonic Nanogap Patterns by Block Copolymer Self-Assembly
Kim, Sang-Kon
Article
Issue Date
2021
Citation
JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS, v.16, no.7, pp.1063 - 1066
Publisher
AMER SCIENTIFIC PUBLISHERS
1
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Author
kim, sang-kon
3
Subject
Lithography
3
EUV
2
Block Copolymer (BCP)
1
FinFET
1
IMPACT
1
LER
1
Line Edge Roughness
1
Mask Defect
1
Nanogap
1
PARAMETERS
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2021
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