가스 흡착·농축 및 동시 센싱이 가능한 3차원 다공성 나노 소재 개발

Abstract

In this study, we present the investigation of the 3-D nano-porous carbon structure for simultaneously adsorbing and sensing the volatile organic compounds(VOCs) gas. Our newly developed nano-porous carbon structure was fabricated by the pyrolysis of the lithographically patterned SU-8 photoresist. This functionalized nano-porous carbon structure can absorb and detect gas. We fabricated a three-dimensional structure using multiple exposure technique to have a large surface area, thereby increasing gas adsorption capacity and sensitivity. The gas adsorbing/sensing performance of our nano-porous carbon was successfully validated.