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구속계수와 감지도에 기반한 집적광학 바이오케미컬 센서에 적합한 수직 SOI 슬롯 광 도파로 최적화Optimization of vertical SOI slot optical waveguide with confinement factor and sensitivity for integrated-optical biochemical sensors
- Other Titles
- Optimization of vertical SOI slot optical waveguide with confinement factor and sensitivity for integrated-optical biochemical sensors
- Authors
- 정홍식
- Issue Date
- Jun-2021
- Publisher
- 한국센서학회
- Keywords
- Slot optical waveguide; Integrated optical biochemical sensor; Label-free; Confinement factor; Sensitivity; Mode matching numerical analysis
- Citation
- 센서학회지, v.30, no.3, pp.131 - 138
- Journal Title
- 센서학회지
- Volume
- 30
- Number
- 3
- Start Page
- 131
- End Page
- 138
- ISSN
- 1225-5475
- Abstract
- The optimization of the specifications of vertical silicon on insulator (SOI) slot optical waveguides suitable for integrated-optical biochemical sensors was performed through computational analysis of the confinement factor of the guided mode distributed in the slot in addition to analytical examination of the TE mode. The optimized specifications were confirmed based on sensitivity in terms of the change in the refractive index of the biochemical analyte. When the slot width, rail width, and height were set to 120 nm, 200 nm, and 320 nm, respectively, the confinement factor was evaluated to be about 56% and the sensitivity was at least 0.9 [RIU/nm].
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Related Researcher
- Jung, Hong sik
- Science & Technology (Department of Electronic & Electrical Convergence Engineering)