Atomic Layer Modulation of Multicomponent Thin Films through Combination of Experimental and Theoretical Approaches
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Nguyen, C.T. | - |
dc.contributor.author | Gu, B. | - |
dc.contributor.author | Cheon, T. | - |
dc.contributor.author | Park, J. | - |
dc.contributor.author | Khan, M.R. | - |
dc.contributor.author | Kim, S.-H. | - |
dc.contributor.author | Shong, Bonggeun | - |
dc.contributor.author | Lee, H.-B.-R. | - |
dc.date.accessioned | 2021-09-02T03:41:50Z | - |
dc.date.available | 2021-09-02T03:41:50Z | - |
dc.date.created | 2021-08-18 | - |
dc.date.issued | 2021-06-22 | - |
dc.identifier.issn | 0897-4756 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/15859 | - |
dc.description.abstract | We proposed the concept of atomic layer modulation (ALM) based on precursor chemical reactivities and steric hindrance effects to fabricate multicomponent nanofilms. Because ALM employs consecutive precursor exposures followed by exposure to a counter reactant, the composition of ALM films is determined by the molecular size and chemical reactivities of the precursors. For the demonstration, dicarbonyl-bis(5-methyl-2,4-hexanediketonato)Ru(II) (Carish) and trimethylaluminum (TMA) were used as Ru and Al precursors, respectively, and H2O was used as the counter reactant. Prior to the experiments, the chemical reactivity and sterically hindered physisorption of the Ru and Al precursors were theoretically calculated using density functional theory (DFT) and Monte Carlo (MC) simulations, respectively. The transmission electron microscopy (TEM) and X-ray photoelectron spectroscopy (XPS) results were highly consistent with the theoretical results, and the growth characteristics were well explained by the MC- and DFT-based reaction models. We believe that ALM could be extended to other material systems, thereby providing a different method of fabricating multicomponent nanofilms for various applications including semiconductors and nanodevices. © | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | American Chemical Society | - |
dc.subject | Aluminum | - |
dc.subject | Density functional theory | - |
dc.subject | High resolution transmission electron microscopy | - |
dc.subject | Modulation | - |
dc.subject | Monte Carlo methods | - |
dc.subject | X ray photoelectron spectroscopy | - |
dc.subject | Growth characteristic | - |
dc.subject | Material systems | - |
dc.subject | Multicomponent thin films | - |
dc.subject | Multicomponents | - |
dc.subject | Reaction model | - |
dc.subject | Steric hindrance effects | - |
dc.subject | Theoretical approach | - |
dc.subject | Trimethylaluminum | - |
dc.subject | Ruthenium compounds | - |
dc.title | Atomic Layer Modulation of Multicomponent Thin Films through Combination of Experimental and Theoretical Approaches | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Shong, Bonggeun | - |
dc.identifier.doi | 10.1021/acs.chemmater.1c00508 | - |
dc.identifier.scopusid | 2-s2.0-85108625515 | - |
dc.identifier.wosid | 000665651400015 | - |
dc.identifier.bibliographicCitation | Chemistry of Materials, v.33, no.12, pp.4435 - 4444 | - |
dc.relation.isPartOf | Chemistry of Materials | - |
dc.citation.title | Chemistry of Materials | - |
dc.citation.volume | 33 | - |
dc.citation.number | 12 | - |
dc.citation.startPage | 4435 | - |
dc.citation.endPage | 4444 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Chemistry | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalWebOfScienceCategory | Chemistry, Physical | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.subject.keywordPlus | Aluminum | - |
dc.subject.keywordPlus | Density functional theory | - |
dc.subject.keywordPlus | High resolution transmission electron microscopy | - |
dc.subject.keywordPlus | Modulation | - |
dc.subject.keywordPlus | Monte Carlo methods | - |
dc.subject.keywordPlus | X ray photoelectron spectroscopy | - |
dc.subject.keywordPlus | Growth characteristic | - |
dc.subject.keywordPlus | Material systems | - |
dc.subject.keywordPlus | Multicomponent thin films | - |
dc.subject.keywordPlus | Multicomponents | - |
dc.subject.keywordPlus | Reaction model | - |
dc.subject.keywordPlus | Steric hindrance effects | - |
dc.subject.keywordPlus | Theoretical approach | - |
dc.subject.keywordPlus | Trimethylaluminum | - |
dc.subject.keywordPlus | Ruthenium compounds | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
94, Wausan-ro, Mapo-gu, Seoul, 04066, Korea02-320-1314
COPYRIGHT 2020 HONGIK UNIVERSITY. ALL RIGHTS RESERVED.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.