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ZnO thin-film transistors with a polymeric gate insulator built on a polyethersulfone substrate

Authors
Hyung, Gun WooPark, JaehoonKoo, Ja RyongChoi, Kyung MinKwon, Sang JikCho, Eou SikKim, Yong SeogKim, Young Kwan
Issue Date
Mar-2012
Publisher
PERGAMON-ELSEVIER SCIENCE LTD
Keywords
Zinc oxide; Thin-film transistor; Atomic layer deposition (ALD); Plastic substrate; Polymeric insulator
Citation
SOLID-STATE ELECTRONICS, v.69, pp.27 - 30
Journal Title
SOLID-STATE ELECTRONICS
Volume
69
Start Page
27
End Page
30
URI
https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/19014
DOI
10.1016/j.sse.2011.12.001
ISSN
0038-1101
Abstract
Zinc oxide (ZnO) thin-film transistors (TFTs) with a cross-linked poly(vinyl alcohol) (c-PVA) insulator are fabricated on a polyethersulfone substrate. The ZnO film, formed by atomic layer deposition, shows a polycrystalline hexagonal structure with a band gap energy of about 3.37 eV. The fabricated ZnO TFT exhibits a field-effect mobility of 0.38 cm(2)/Vs and a threshold voltage of 0.2 V. The hysteresis of the device is mainly caused by trapped electrons at the c-PVA/ZnO interface, whereas the positive threshold voltage shift occurs as a consequence of constant positive gate bias stress after 5000 s due to an electron injection from the ZnO film into the c-PVA insulator. (c) 2011 Elsevier Ltd. All rights reserved.
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