Prepassivated AlGaN/GaN HEMTs with improved edge acuity in annealed ohmic contacts
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, M. | - |
dc.contributor.author | Ryoo, Y. | - |
dc.contributor.author | Lee, J. -G. | - |
dc.contributor.author | Cha, H. -Y. | - |
dc.contributor.author | Seo, K. | - |
dc.date.accessioned | 2021-12-15T02:42:52Z | - |
dc.date.available | 2021-12-15T02:42:52Z | - |
dc.date.created | 2021-12-10 | - |
dc.date.issued | 2011-06-09 | - |
dc.identifier.issn | 0013-5194 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/19865 | - |
dc.description.abstract | Sharp edge definition of annealed ohmic contacts is of great concern in AlGaN/GaN high electron mobility transistors (HEMTs) because it is strongly associated with breakdown voltage uniformity and reliability. In this reported work, two-step sequential annealing in conjunction with a low-damage SiN(x) dry etching technique was employed in a pre-passivation process in order to improve the edge acuity in annealed ohmic contacts. As a result, uniformity in breakdown voltage was significantly improved in comparison with a conventional process. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | INST ENGINEERING TECHNOLOGY-IET | - |
dc.title | Prepassivated AlGaN/GaN HEMTs with improved edge acuity in annealed ohmic contacts | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Cha, H. -Y. | - |
dc.identifier.doi | 10.1049/el.2011.1190 | - |
dc.identifier.scopusid | 2-s2.0-80053272494 | - |
dc.identifier.wosid | 000291384100031 | - |
dc.identifier.bibliographicCitation | ELECTRONICS LETTERS, v.47, no.12, pp.725 - 726 | - |
dc.relation.isPartOf | ELECTRONICS LETTERS | - |
dc.citation.title | ELECTRONICS LETTERS | - |
dc.citation.volume | 47 | - |
dc.citation.number | 12 | - |
dc.citation.startPage | 725 | - |
dc.citation.endPage | 726 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Engineering | - |
dc.relation.journalWebOfScienceCategory | Engineering, Electrical & Electronic | - |
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