Fabrication of Volmer-Weber Type ZnO Nanorods by Combining RF Sputtering and Hydrothermal Methods

Abstract

We fabricated Volmer-Weber type ZnO nanorods by using a hydrothermal method combing with an RF sputtering system. Volmer-Weber type ZnO seed nanocrystals were formed on Pt(111)/TiO2/SiO2/Si(100) substrates by using RF sputtering method and then the seeded substrates were soaked in an aqueous chemical solution, which was mixed with Zn(NO3)(2)center dot 6H(2)O and NaOH. We found that ZnO nanorods were perpendicularly grown along the [002] direction by using X-ray diffraction (XRD) and scanning electron microscopy (SEM) methods. We also confirmed that fabricated ZnO nanorods were Volmer-Weber type by using an energy dispersive X-ray spectrometer (EDX) method.