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Quantitative Scanning Thermal microscopy with double scan technique

Authors
Kim, K.Jaung, S.Chung, J.Won, J.Kwon, O.Lee, J.S.Park, S.Choi, Y.K.
Issue Date
2008
Keywords
AFM; Nanoscale temperature; SThM (Scanning Thermal Microscope); Thermoelectric probe
Citation
2008 Proceedings of the ASME Micro/Nanoscale Heat Transfer International Conference, MNHT 2008, v.PART B, pp.899 - 904
Journal Title
2008 Proceedings of the ASME Micro/Nanoscale Heat Transfer International Conference, MNHT 2008
Volume
PART B
Start Page
899
End Page
904
URI
https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/23432
DOI
10.1115/MNHT2008-52266
ISSN
0000-0000
Abstract
Scanning Thermal Microscope (SThM) is known as a tool of the highest spatial resolution in measuring local temperature and thermophysical properties. However, despite the highest spatial resolution of SThM, its usefulness has been limited because of the difficulties related to the quantitative interpretation of the measured data. We suggest a double scan technique that can make an advantage of heat transfer through the tip-sample contact by subtraction of air conduction signal obtained from 'lift mode' scan. The thermal signal obtained by the new method is free from the influence of air conduction. This, in turn, allowed the quantitative profiling of the sample temperature. Copyright © 2008 by ASME.
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