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Analysis and design of thermal double-cantilever bimorph actuators for rotating-type micromirrors
- Issue Date
- 2008
- Keywords
- Intellisuite; Micro actuators; Thermal double-cantilever bimorph actuators; Thermal expansion
- Citation
- 2008 Proceedings of the ASME Micro/Nanoscale Heat Transfer International Conference, MNHT 2008, v.PART B, pp.1063 - 1067
- Journal Title
- 2008 Proceedings of the ASME Micro/Nanoscale Heat Transfer International Conference, MNHT 2008
- Volume
- PART B
- Start Page
- 1063
- End Page
- 1067
- ISSN
- 0000-0000
- Abstract
- This paper reports the design and simulation of thermal double-cantilever bimorph(TDCB) actuators that can be used to drive micromirrors efficiently. A TDCB actuator combines two paralleled bimorph actuators acting in opposite directions for rotational control of micromirrors. Each actuator is structured by nickel and silicon dioxide thin films with an embedded polysilicon line as a heat source. With a size of only 20 μ m width and 100μm length, TDCB actuators result in vertical displacement of 28 μ m at 11 volts DC which is a significant improvement, comparing to the conventional thermal bimorph actuators. Copyright © 2008 by ASME.
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