Novel nanoscale thermal property imaging technique: The 2 omega method. I. Principle and the 2 omega signal measurement
- Authors
- Roh, Hee Hwan; Lee, Joon Sik; Kim, Dong Lib; Park, Jisang; Kim, Kyeongtae; Kwon, Ohmyoung; Park, Seung Ho; Choi, Young Ki; Majumdar, Arun
- Issue Date
- Sep-2006
- Publisher
- A V S AMER INST PHYSICS
- Citation
- JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.24, no.5, pp.2398 - 2404
- Journal Title
- JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
- Volume
- 24
- Number
- 5
- Start Page
- 2398
- End Page
- 2404
- URI
- https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/24507
- DOI
- 10.1116/1.2353842
- ISSN
- 1071-1023
- Abstract
- In this and the following companion articles, the authors present the 2 omega method, a novel ac mode local thermal property imaging technique with nanoscale spatial resolution. To demonstrate the use of the thermoelectric probe as an active one that can function as both a heater and a temperature sensor, the authors develop and implement the 2 omega signal measurement technique, which can extract thermoelectric signals from a thermocouple junction while electrically heating it simultaneously. The principle of the 2 omega signal measurement technique is explained by a steady periodic electrothermal analysis. The authors use a specially designed test pattern to experimentally verify that the 2 omega signal is caused by the temperature oscillation induced by Joule heating. In addition, based on the results from an experiment using a cross-shaped pattern, the measurement accuracy of the 2 omega method depends on the junction size of the thermoelectric probe. The 2 omega method is implemented and compared with other methods in the following companion paper. (c) 2006 American Vacuum Society.
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Collections - College of Engineering > Department of Mechanical and System Design Engineering > 1. Journal Articles
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