DLC박막의 탄소 음이온빔 효과에 관한 연구The Effects of Negative Carbon Ion Beam Energy on the Properties of DLC Film
- Other Titles
- The Effects of Negative Carbon Ion Beam Energy on the Properties of DLC Film
- Authors
- 김대일; 유용주; 김유성; 장호성; 천희곤; 최비공; 최대한; 이진희; 윤기성
- Issue Date
- 2006
- Publisher
- 한국표면공학회
- Keywords
- Diamond-like carbon; Ion bombardment; Nanohardness; AFM; Diamond-like carbon; Ion bombardment; Nanohardness; AFM
- Citation
- 한국표면공학회지, v.39, no.4, pp.198 - 202
- Journal Title
- 한국표면공학회지
- Volume
- 39
- Number
- 4
- Start Page
- 198
- End Page
- 202
- URI
- https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/24809
- ISSN
- 1225-8024
- Abstract
- The effects of negative carbon ion beam energy on the bonding configuration, hardness and surface roughness of DLC film prepared by a direct metal ion beam deposition system were investigated. As the negative carbon ion beam energy increased from 25 to 150 eV, the sp3 fraction of DLC films was increased from 32 to 67%, while the surface roughness was decreased. The films prepared at 150 eV showed the more flat surface morphology of the film than that of the film prepared under another ion beam energy conditions. Surface roughness of DLC film varied from 0.62 to 0.22 nm with depositing carbon ion beam energy. Surface nanohardness increased from 12 to 57 Gpa when increasing the negative carbon ion beam energy from 25 to 150 eV, and then decreased when increasing the ion beam energy from 150 to 200 eV.
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Collections - College of Science and Technology > Department of Computer and Information Communications Engineering > 1. Journal Articles
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