Gate Workfunction Optimization of a 32 nm Metal Gate MOSFET for Low Power ApplicationsGate Workfunction Optimization of a 32 nm Metal Gate MOSFET for Low Power Applications
- Other Titles
- Gate Workfunction Optimization of a 32 nm Metal Gate MOSFET for Low Power Applications
- Authors
- Yongho Oh; 김영민
- Issue Date
- 2006
- Publisher
- 대한전기학회
- Keywords
- . m); low power; metal gate; retrograde channel; Vt roll-off; . m); low power; metal gate; retrograde channel; Vt roll-off
- Citation
- Journal of Electrical Engineering & Technology, v.1, no.2, pp.237 - 240
- Journal Title
- Journal of Electrical Engineering & Technology
- Volume
- 1
- Number
- 2
- Start Page
- 237
- End Page
- 240
- URI
- https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/24998
- ISSN
- 1975-0102
- Abstract
- - The feasibility of a midgap metal gate is investigated for a 32 nm MOSFET for low powerapplications. The midgap metal gate MOSFET is found to deliver Ion as high as a bandedge gate if a the performance requirement given in the ITRS roadmap. A process simulation is also run to evaluate the feasibility of the necessary retrograde profile in manufacturing environments. Based on the simulated result, it is found that any subsequent thermal process should be tightly controlled to retain transistor performance, which is achieved using the retrograde doping profile. Also, the bandedge gate MOSFET is determined be more vulnerable to the subsequent thermal processes than the midgap gate MOSFET. A guideline for gate workfunction (Фm) is sugested for the 32 nm MOSFET. .
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Collections - College of Engineering > School of Electronic & Electrical Engineering > 1. Journal Articles
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