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FDTD analysis of the self-aligned total internal reflection mirrors for micro-ring cavity resonators
- Issue Date
- 2005
- Publisher
- IOP PUBLISHING LTD
- Citation
- COMPOUND SEMICONDUCTORS 2004, PROCEEDINGS, v.184, pp.217 - 220
- Journal Title
- COMPOUND SEMICONDUCTORS 2004, PROCEEDINGS
- Volume
- 184
- Start Page
- 217
- End Page
- 220
- ISSN
- 0951-3248
- Abstract
- This paper presents self-aligned total internal reflection mirrors with a total reflection loss of 0.7 dB/mirror which is close to the theoretical limit as assessed by FDTD analysis. Enabling schemes for such low loss mirrors turned out to be the passivation of the mirror surface by SiN.
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Related Researcher
- Yi, Jong Chang
- Engineering (Electronic & Electrical Engineering)