Effects of reactive gas compositions on the magnetic properties and microstructures of FeTaNC films

Abstract

Soft magnetic properties and microstructure evolutions of FeTaNC films were investigated, and compared with those of FeTaN and FeTaC films. Effects of substrate species (glass vs. CaTiO3) on the magnetic properties were also investigated. Go-addition of N and C enhances the grain refinements and soft magnetism compared with N or C only addition. Good soft magnetic characteristics of coercivity of 0.17 Oe, permeability of 4000 (5 MHz), and magnetic flux density of 17 kG can be obtained in the FeTaNC films with the relatively wide process ranges. While these values appear to be similar to those of FeTaN films on glass substrate, the most distinctive difference between FeTaNC and FeTaN (or C) films is the effects of substrate. Whereas FeTaNC films show good magnetic characteristics on both glass and CaTiO3 substrates, FeTaN (or C) films show substantial degradation on the CaTiO3 substrate.