Manufacturing of ceramic composites reinforced with layered woven fabrics by CVI of SiC from dichlorodimethylsilane

Abstract

Manufacturing of ceramic/ceramic composites by chemical vapor infiltration of SiC from dichlorodimethylsilane (DDS) in 2- and 4-ply woven carbon fabrics has been studied. Dense deposition was obtained at a low reaction pressure such as 10 torr, as expected. However, little deposition was occurred at low DDS concentration such as 4%. Spaces between plies were left void with little deposition. The amount of deposition was proportional to the pressure and the DDS concentration. From the experimental data of the amount of deposition, the first order deposition rate constant of 40 cm/min was estimated. This value was bigger than our previous value. The tendencies for 4-ply sample were similar to those of 2-ply sample. Scanning electron microphotographs and pore size distribution analysis showed the same results.