Characterization of Young’s modulus of silicon versus temperature using a ‘‘beam deflection” method with a four-point bending fixture
DC Field | Value | Language |
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dc.contributor.author | Cho, Chun Hyung | - |
dc.date.accessioned | 2022-05-25T02:40:07Z | - |
dc.date.available | 2022-05-25T02:40:07Z | - |
dc.date.created | 2021-12-24 | - |
dc.date.issued | 2009-03 | - |
dc.identifier.issn | 1567-1739 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/28115 | - |
dc.description.abstract | Young’s modulus (E) and Poisson’s ratio (m) are dependent upon the direction on the silicon surface. In this work, E and m of silicon have been calculated analytically for any crystallographic direction of silicon by using compliance coefficients (s11, s12, and s44), and the values of E are confirmed experimentally by using a ‘‘beam deflection” method with a four-point bending fixture. Experimental results for E as a function of temperature from -150 ℃ to +150 ℃ are presented for (001) and (111) silicon wafers. | - |
dc.publisher | 한국물리학회 | - |
dc.title | Characterization of Young’s modulus of silicon versus temperature using a ‘‘beam deflection” method with a four-point bending fixture | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Cho, Chun Hyung | - |
dc.identifier.bibliographicCitation | Current Applied Physics, v.9, no.3, pp.538 - 545 | - |
dc.relation.isPartOf | Current Applied Physics | - |
dc.citation.title | Current Applied Physics | - |
dc.citation.volume | 9 | - |
dc.citation.number | 3 | - |
dc.citation.startPage | 538 | - |
dc.citation.endPage | 545 | - |
dc.type.rims | ART | - |
dc.identifier.kciid | ART001326466 | - |
dc.description.journalClass | 2 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | kci | - |
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