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Dopant Activation of Ion Shower Doped Poly-Si Using Induction Annealing
- Authors
- 노재상
- Issue Date
- 29-Nov-2018
- Publisher
- International Journal of Emerging Technology and Advanced Engineering
- Citation
- International Journal of Emerging Technology and Advanced Engineering , v.8, no.11, pp.24 - 26
- Journal Title
- International Journal of Emerging Technology and Advanced Engineering
- Volume
- 8
- Number
- 11
- Start Page
- 24
- End Page
- 26
- Abstract
- Abstract? We report a novel method of activation annealing, named as induction annealing (IA). IA was realized by applying alternating electric field induced by alternating magnetic filed applied to the sample. We observed the enhanced kinetics of dopant activation by using IA.
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