SOI 슬롯 광도파로 기반 캐스케이드 링 공진기 바이오·케미컬 집적광학 센서의 효용성 해석Application Utility Analysis of Series-cascaded Ring Resonators Based on SOI Slot Optical Waveguides in Integrated Optical Biochemical Sensor
- Other Titles
- Application Utility Analysis of Series-cascaded Ring Resonators Based on SOI Slot Optical Waveguides in Integrated Optical Biochemical Sensor
- Authors
- 장재식; 정홍식
- Issue Date
- Sep-2022
- Publisher
- 한국센서학회
- Keywords
- Series cascaded ring resonator; Silicon photonics; Slot optical waveguides; Integrated optical biochemical sensor
- Citation
- 센서학회지, v.31, no.5, pp.353 - 359
- Journal Title
- 센서학회지
- Volume
- 31
- Number
- 5
- Start Page
- 353
- End Page
- 359
- URI
- https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/30460
- DOI
- 10.46670/JSST.2022.31.5.353
- ISSN
- 1225-5475
- Abstract
- This study investigated via computational analysis the application utility of series-cascaded ring resonators based on silicon-on-insulator (SOI) slot optical waveguides in integrated optical biochemical sensors. The radii of the two rings in the series-cascaded ring resonators were 59.4 µm and 77.6 µm respectively, and the coupling distance was 0.5 µm. The series-cascaded ring resonators were computationally analyzed using FIMMProp and PICWave numerical software. The free spectral range (FSR), full width at half maximum(FWHM), sensitivity, and quality-factor (Q-factor) of the series-cascaded ring resonators were 12.2 nm, 0.134 nm, 4100 nm/RIU, and 11580, respectively, and the measurement range was calculated to be slightly smaller than 3×10-3 RIU. Although the measurementrange was smaller than that of the single ring resonator, upon considering other characteristic parameters, the series-cascaded ring resonators are found to be more effective as integrated sensors than single ring resonators.
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