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Effect of oxidants on atomic layer deposition of Al2O3: A DFT study
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 송봉근 | - |
| dc.date.available | 2020-07-10T04:21:42Z | - |
| dc.date.created | 2020-07-08 | - |
| dc.date.issued | 2018-08-22 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/3321 | - |
| dc.language | 영어 | - |
| dc.language.iso | en | - |
| dc.publisher | International Union of Materials Research Societies | - |
| dc.title | Effect of oxidants on atomic layer deposition of Al2O3: A DFT study | - |
| dc.type | Article | - |
| dc.contributor.affiliatedAuthor | 송봉근 | - |
| dc.identifier.bibliographicCitation | IUMRS-ICEM 2018, v.0, no.0, pp.0 - 0 | - |
| dc.relation.isPartOf | IUMRS-ICEM 2018 | - |
| dc.citation.title | IUMRS-ICEM 2018 | - |
| dc.citation.volume | 0 | - |
| dc.citation.number | 0 | - |
| dc.citation.startPage | 0 | - |
| dc.citation.endPage | 0 | - |
| dc.type.rims | ART | - |
| dc.description.journalClass | 1 | - |
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Related Researcher
- Shong, Bong geun
- Engineering (Chemical Engineering)