P-GaN/p-AlGaN/AlGaN/GaN Heterojunction Field-Effect Transistor With a Threshold Voltage of 6 V
- Issue Date
- Jun-2024
- Publisher
- IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
- Citation
- IEEE ELECTRON DEVICE LETTERS, v.45, no.6, pp 972 - 975
- Pages
- 4
- Journal Title
- IEEE ELECTRON DEVICE LETTERS
- Volume
- 45
- Number
- 6
- Start Page
- 972
- End Page
- 975
- URI
- https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/33358
- DOI
- 10.1109/LED.2024.3391619
- ISSN
- 0741-3106
1558-0563
- Abstract
- In this study, we proposed a novel p-GaN/p-AlGaN/AlGaN/GaN heterojunction field-effect transistor (HFET). When a selective etching process is used to precisely etch the p-GaN layer of a conventional p-GaN/AlGaN/GaN HFET structure, over-etching-induced surface damage can degrade the device characteristics. By inserting a p-AlGaN layer between p-GaN and AlGaN, the over-etching-induced plasma damage at the surface of the p-AlGaN layer can subsequently be removed using a low-damage atomic layer etching process. As a result, the surface damage issue can be mitigated. An additional benefit of using the p-AlGaN layer is a higher threshold voltage. The fabricated p-GaN/p-AlGaN/AlGaN/GaN HFET exhibited a remarkably high threshold voltage of 6 V with a specific on-resistance of 7.47 m center dot Omega cm(2).
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