Roh, Hee Hwan; Lee, Joon Sik; Kim, Dong Lib; Park, Jisang; Kim, Kyeongtae; Kwon, Ohmyoung; Park, Seung Ho; Choi, Young Ki; Majumdar, Arun
ArticleIssue Date2006CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.24, no.5, pp.2398 - 2404PublisherA V S AMER INST PHYSICS