p-GaN/AlGaN/GaN E-mode FET 제작을 위한 선택적 GaN 식각 공정 개발
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 장원호 | - |
dc.contributor.author | 차호영 | - |
dc.date.available | 2020-07-10T02:35:01Z | - |
dc.date.created | 2020-07-06 | - |
dc.date.issued | 2020 | - |
dc.identifier.issn | 2234-4772 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/696 | - |
dc.description.abstract | In this work, we developed a selective etching process for GaN that is a key process in p-GaN/AlGaN/GaN enhancement-mode (E-mode) power switching field-effect transistor (FET) fabrication. In order to achieve a high current density of p-GaN/AlGaN/GaN E-mode FET, the p-GaN layer beside the gate region must be selectively etched whereas the underneath AlGaN layer should be maintained. A selective etching process was implemented by oxidizing the surface of the AlGaN layer and the GaN layer by adding O2 gas to Cl2/N2 gas which is generally used for GaN etching. A selective etching process was optimized using Cl2/N2/O2 gas mixture and a high selectivity of 53:1 (= GaN/AlGaN) was achieved. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | 한국정보통신학회 | - |
dc.title | p-GaN/AlGaN/GaN E-mode FET 제작을 위한 선택적 GaN 식각 공정 개발 | - |
dc.title.alternative | Development of Selective GaN etching Process for p-GaN/AlGaN/GaN E-mode FET Fabrication | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | 차호영 | - |
dc.identifier.doi | 10.6109/jkiice.2020.24.2.321 | - |
dc.identifier.bibliographicCitation | 한국정보통신학회논문지, v.24, no.2, pp.321 - 324 | - |
dc.relation.isPartOf | 한국정보통신학회논문지 | - |
dc.citation.title | 한국정보통신학회논문지 | - |
dc.citation.volume | 24 | - |
dc.citation.number | 2 | - |
dc.citation.startPage | 321 | - |
dc.citation.endPage | 324 | - |
dc.type.rims | ART | - |
dc.identifier.kciid | ART002560763 | - |
dc.description.journalClass | 2 | - |
dc.description.journalRegisteredClass | kci | - |
dc.subject.keywordAuthor | Enhancement-mode | - |
dc.subject.keywordAuthor | GaN | - |
dc.subject.keywordAuthor | p-GaN | - |
dc.subject.keywordAuthor | Selective etching | - |
dc.subject.keywordAuthor | FET | - |
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