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Results 11-20 of 97 (Search time: 0.489 seconds).
Chemical mechanism of formation of the 2-dimensional electron gas at the Al2O3/TiO2 interface by atomic layer deposition
송봉근
Article
Issue Date
2019
Citation
한국반도체학술대회, v.0, no.0, pp.0 - 0
Publisher
한국반도체학술대회
dummy title
송봉근
Article
Issue Date
2018
Citation
dummy, v.0, no.0, pp.0 - 0
Publisher
dummy
Quantum mechanical analysis of chemical reactions during ALD
송봉근
Article
Issue Date
2019
Citation
China-Korea ALD Workshop, v.-, no.-, pp.0 - 0
Publisher
Fudan University
Plasma-enhanced atomic layer deposition of tungsten films using tungsten chloride precursor
송봉근
Article
Issue Date
2018
Citation
ALD 2018, v.0, no.0, pp.0 - 0
Publisher
American Vacuum Society
Tungsten thin films deposited by plasma-enhanced atomic layer deposition with tungsten chloride precursor
송봉근
Article
Issue Date
2018
Citation
ICMAP 2018, v.0, no.0, pp.0 - 0
Publisher
ICMAP 2018
basics of ALD surface chemistry
송봉근
Article
Issue Date
2019
Citation
MECARO-ALD Academy , v.0, no.0, pp.0 - 0
Publisher
한국반도체디스플레이기술학회
Comprehensive Studies of Atomic Layer Deposited InGaO Thin Films using InCA-1, TMGa and H2O2 for Oxide Semiconductor Thin Film Transistor Applications
송봉근
Article
Issue Date
2017
Citation
AVS 17th International Conference on Atomic Layer Deposition , v.17, no.0, pp.0 - 0
Publisher
American Vacuum Society
Tungsten Thin Film Grown by Plasma-Enhanced Atomic Layer Deposition Using Fluorine Free Precursor
송봉근
Article
Issue Date
2018
Citation
반도체학술대회, v.반도체학술대회, no.-, pp.0 - 0
Publisher
반도체학술대회
Quantum mechanical simulation studies of surface reactions during atomic layer deposition
송봉근
Article
Issue Date
2018
Citation
반도체학술대회, v.반도체학술대회, no.-, pp.0 - 0
Publisher
반도체학술대회
Effect of oxidants on atomic layer deposition of Al2O3: A DFT study
송봉근
Article
Issue Date
2018
Citation
IUMRS-ICEM 2018, v.0, no.0, pp.0 - 0
Publisher
International Union of Materials Research Societies
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Hwang, Jin ha
3
Kim, Bumsang
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Subject
GROWTH
17
ALD
10
OXIDE
10
THIN-FILMS
9
Atomic layer deposition
8
MECHANISM
7
CHEMICAL-VAPOR-DEPOSITION
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Density functional theory
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2023
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2019
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2018
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2017
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Type
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97
Language
English
81
Korean
3
Journal
Chemistry of Materials
13
Applied Surface Science
10
한국반도체학술대회
8
Journal of Physical Chemistry C
6
Ceramics International
4
ACS Applied Materials and Interfaces
3
한국화학공학회 학술대회 초록집
3
ACS Nano
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ACS National Meeting Book of Abst...
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ALD 2018
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