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Results 1-8 of 8 (Search time: 0.002 seconds).
Demetallization of Molecular Layer Deposited Organic-Inorganic Hybrid Indicone Thin Films by Thermal Annealing
송봉근
Article
Issue Date
2019
Citation
한국반도체학술대회, v.0, no.0, pp.0 - 0
Publisher
한국반도체학술대회
Computational screening for metal oxide precursors toward area-selective atomic layer deposition (AS-ALD)
송봉근
Article
Issue Date
2019
Citation
한국반도체학술대회, v.0, no.0, pp.0 - 0
Publisher
한국반도체학술대회
Mechanistic investigation on atomic layer deposition of group 13 oxides
송봉근
Article
Issue Date
2019
Citation
한국반도체학술대회, v.0, no.0, pp.0 - 0
Publisher
한국반도체학술대회
Molecular adsorption and doping of Hf and Zr dichalcogenides
송봉근
Article
Issue Date
2019
Citation
한국반도체학술대회, v.0, no.0, pp.0 - 0
Publisher
한국반도체학술대회
Atomic Layer Modulation for Multicomponent Thin Films
송봉근
Article
Issue Date
2019
Citation
한국반도체학술대회, v.0, no.0, pp.0 - 0
Publisher
한국반도체학술대회
Chemical mechanism of formation of the 2-dimensional electron gas at the Al2O3/TiO2 interface by atomic layer deposition
송봉근
Article
Issue Date
2019
Citation
한국반도체학술대회, v.0, no.0, pp.0 - 0
Publisher
한국반도체학술대회
A comparative study on the adsorption of silicon tetrahalides toward low-temperature thermal atomic layer deposition of silicon nitride
송봉근
Article
Issue Date
2019
Citation
한국반도체학술대회, v.0, no.0, pp.0 - 0
Publisher
한국반도체학술대회
Oxidation mechanism of WS2 by water and alcohol
송봉근
Article
Issue Date
2019
Citation
한국반도체학술대회, v.0, no.0, pp.0 - 0
Publisher
한국반도체학술대회
1
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Author
Shong, Bong geun
8
Date Issued
2019
8
Type
Article
8
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English
8
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