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Results 1-1 of 1 (Search time: 0.002 seconds).
Chemical mechanism of oxidative etching of ruthenium: Insights into continuous versus self-limiting conditions
Yu, N.-K.; Lee, J.-M.; Kim, W.-H.;
Shong, B.
Article
Issue Date
2023
Citation
Applied Surface Science, v.636
Publisher
Elsevier B.V.
1
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Subject
AMMONIA-SYNTHESIS
1
Atomic layer etching
1
CO OXIDATION
1
Computational chemistry
1
Dry etching
1
ELASTIC BAND METHOD
1
EVOLUTION
1
REDUCTION
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RU THIN-FILMS
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SUBSURFACE OXYGEN
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