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Results 1-1 of 1 (Search time: 0.003 seconds).
Adsorption mechanism of dimeric Ga precursors in metalorganic chemical vapor deposition of gallium nitride
Kim, Hankyu; Kim, Miso;
Kim, Bumsang
;
Shong, Bonggeun
Article
Issue Date
2023
Citation
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.41, no.6
Publisher
A V S AMER INST PHYSICS
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Author
Shong, Bong geun
1
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CHEMISTRY
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TEMPERATURE
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2023
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English
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Journal of Vacuum Science and Tec...
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