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Surface chemical reactions during atomic layer deposition of ZnO, ZnS, and Zn(O,S)
Tran Thi Ngoc Van; Ansari, Abu Saad;
Shong, Bonggeun
Article
Issue Date
2019
Citation
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.37, no.2
Publisher
A V S AMER INST PHYSICS
1
Discover
Author
Shong, Bong geun
1
Subject
ADSORPTION
1
OXIDE
1
ZINC OXYSULFIDE
1
Date Issued
2019
1
Type
Article
1
Language
English
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