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Wet Etching시 Ultrasonic의 주파수가 실리콘 웨이퍼 표면형상에 미치는 영향
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Roh, Jae Seung | - |
| dc.date.available | 2020-04-25T10:26:17Z | - |
| dc.date.created | 2020-04-01 | - |
| dc.date.issued | 2013-05-23 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/kumoh/handle/2020.sw.kumoh/10056 | - |
| dc.publisher | 한국재료학회 | - |
| dc.title | Wet Etching시 Ultrasonic의 주파수가 실리콘 웨이퍼 표면형상에 미치는 영향 | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Roh, Jae Seung | - |
| dc.identifier.bibliographicCitation | 2013년도 한국재료학회 춘계학술발표대회 및 제 24회 신소재 심포지엄, v.2013, no.1, pp.148 | - |
| dc.relation.isPartOf | 2013년도 한국재료학회 춘계학술발표대회 및 제 24회 신소재 심포지엄 | - |
| dc.relation.isPartOf | 2013년도 한국재료학회 춘계학술발표대회 논문집 | - |
| dc.citation.title | 2013년도 한국재료학회 춘계학술발표대회 및 제 24회 신소재 심포지엄 | - |
| dc.citation.volume | 2013 | - |
| dc.citation.number | 1 | - |
| dc.citation.startPage | 148 | - |
| dc.citation.endPage | 148 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.conferencePlace | 여수 엠블호텔 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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Related Researcher
- Roh, Jae Seung
- College of Engineering (Department of Materials Science and Engineering)