Si-wafer wet etching 시 etching time, etching temperature, 불산 및 질산 농도가 etching rate에 미치는 영향
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Roh, Jae Seung | - |
dc.date.available | 2020-04-25T12:25:21Z | - |
dc.date.created | 2020-04-01 | - |
dc.date.issued | 2012-11-08 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/kumoh/handle/2020.sw.kumoh/10523 | - |
dc.publisher | 한국재료학회 | - |
dc.title | Si-wafer wet etching 시 etching time, etching temperature, 불산 및 질산 농도가 etching rate에 미치는 영향 | - |
dc.type | Conference | - |
dc.contributor.affiliatedAuthor | Roh, Jae Seung | - |
dc.identifier.bibliographicCitation | 2012년 한국재료학회 추계학술대회, v.2, no.2, pp.p-8 | - |
dc.relation.isPartOf | 2012년 한국재료학회 추계학술대회 | - |
dc.relation.isPartOf | 2012년 한국재료학회 추계학술대회 발표논문집 | - |
dc.citation.title | 2012년 한국재료학회 추계학술대회 | - |
dc.citation.volume | 2 | - |
dc.citation.number | 2 | - |
dc.citation.startPage | p-8 | - |
dc.citation.endPage | p-8 | - |
dc.citation.conferencePlace | 리카이샌드파인리조트(강릉) | - |
dc.type.rims | CONF | - |
dc.description.journalClass | 2 | - |
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