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Si-wafer의 wet etching시 표면특성변화에 미치는 etching 속도의 영향
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Roh, Jae Seung | - |
| dc.date.available | 2020-04-25T13:26:07Z | - |
| dc.date.created | 2020-04-01 | - |
| dc.date.issued | 2012-05-17 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/kumoh/handle/2020.sw.kumoh/10974 | - |
| dc.publisher | 한국재료학회 | - |
| dc.title | Si-wafer의 wet etching시 표면특성변화에 미치는 etching 속도의 영향 | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Roh, Jae Seung | - |
| dc.identifier.bibliographicCitation | 2012년 한국재료학회 춘계학술대회, v.1, no.1, pp.p-10 | - |
| dc.relation.isPartOf | 2012년 한국재료학회 춘계학술대회 | - |
| dc.relation.isPartOf | 2012년 한국재료학회 춘계학술대회 발표논문집 | - |
| dc.citation.title | 2012년 한국재료학회 춘계학술대회 | - |
| dc.citation.volume | 1 | - |
| dc.citation.number | 1 | - |
| dc.citation.startPage | p-10 | - |
| dc.citation.endPage | p-10 | - |
| dc.citation.conferencePlace | 무주 덕유산 리조트 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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Related Researcher
- Roh, Jae Seung
- College of Engineering (Department of Materials Science and Engineering)